Ph.D. in Mechanical Engineering, Micro/Nano Systems Track
(47 credits – 33 course credit hours, 14 research credit hours)

Track Requirements

  • Two core courses (ME 5050, ME 5055) are required.
  • Minimum of 4 elective classes should be taken from the approved list. Additionally, two elective classes can be taken from departments other than ME and ECE.

These are example course flows for Ph.D. students entering with a BS. Students entering with an MS should discuss their plan of study with their advisor.

Nano Systems FocusSensors / Design FocusBioMEMS Focus

Coursework flow Sample#1 (Nano Systems Focus)

Year 1 Fall Semester Year 1 Spring Semester
Number Title Credits Number Title Credits
ME 6050 Micromachining (R) 3 ME 6055 Microsystems Des & Char (R) 3
Open Option (F) ME 7960 Nanofabrication (E) 3
ME 7970 Thesis Directed Research 3 ME 7970 Thesis Directed Research 3
Semester Total 9 Semester Total 9
Year 2 Fall Semester Year 2 Spring Semester
Number Title Credits Number Title Credits
ME 6053 Microactuators (E) 3 MSE 5073 Nanostructure Materials: Science & Technology (E) 3
ECE 6226 Electrical interf. for MEMS (E) 3 ME EN 6730 Microfluidic Chip Design and Fabrication (E) 3
ME 7970 Thesis Directed Research 3 ME 7970 Thesis Directed Research 3
Semester Total 9 Semester Total 9
Year 3 Fall Semester Year 3 Spring Semester
Number Title Credits Number Title Credits
ME 7960 Low dimens. Materials (E) 3 ME 6035 Design of experiment (F) 3
ECE 6235 Nano electro mech. Sys. (E) 3 ME 7970 Thesis Directed Research 6
ME 7970 Thesis Directed Research 3
Semester Total 9 Semester Total 9

(R) Required, (E) Elective course, (F) free choice

* Consult with advisor on Elective and Open Option courses

* 9 credit hours are required to claim full-time status

Coursework flow Sample#2 (Sensors / Design Focus)

Year 1 Fall Semester Year 1 Spring Semester
Number Title Credits Number Title Credits
ME 6050 Micromachining (R) 3 ME 6055 Microsystems Des & Char (R) 3
ECE 6226 Electrical Interf. for MEMS (E) 3 ME 6051 Microsensors (E) 3
ME 7970 Thesis Directed Research 3 ME 7970 Thesis Directed Research 3
Semester Total 9 Semester Total 9
Year 2 Fall Semester Year 2 Spring Semester
Number Title Credits Number Title Credits
ME 6053 Microactuators (E) 3 ME 6070 Energy Harvesting (E) 3
ME 6205 System Dynamics (F) 3 ME 6035 Design of Experiments (F) 3
ME 7970 Thesis Directed Research 3 ME 7970 Thesis Directed Research 3
Semester Total 9 Semester Total 9
Year 3 Fall Semester Year 3 Spring Semester
Number Title Credits Number Title Credits
ME 6025 Intro to Optimization (F) 3 Open Option 3
Open Option 3 ME 7970 Thesis Directed Research 6
ME 7970 Thesis Directed Research 3
Semester Total 9 Semester Total 9

(R) Required, (E) Elective course, (F) free choice

Consult with advisor on Elective and Open Option courses

9 credit hours are required to claim full-time status

Coursework flow Sample#3 (BioMEMS Focus)

Year 1 Fall Semester Year 1 Spring Semester
Number Title Credits Number Title Credits
ME 6050 Micromachining (R) 3 ME 6055 Microsystems Des & Char (R) 3
Open Option ME 6730 Microfluidic Chip Design and Fabrication (E) 3
ME 7970 Thesis Directed Research 3 ME 7970 Thesis Directed Research 3
Semester Total 9 Semester Total 9
Year 2 Fall Semester Year 2 Spring Semester
Number Title Credits Number Title Credits
ME 7960 Advanced Microfluidics (E) 3 ME 7960 Nanofabrication (E) 3
Open Option MSE 5073 Nanostructure Materials: Science & Technology (E) 3
ME 7970 Thesis Directed Research 3 ME 7970 Thesis Directed Research 3
Semester Total 9 Semester Total 9
Year 3 Fall Semester Year 3 Spring Semester
Number Title Credits Number Title Credits
Open Option 3 Open Option 3
Open Option 3 ME 7970 Thesis Directed Research 6
ME 7970 Thesis Directed Research 3
Semester Total 9 Semester Total 9

(R) Required, (E) Elective course, (F) free choice

Consult with advisor on Elective and Open Option courses

9 credit hours are required to claim full-time status